乐投英超

乐投英超XIANGJIERENZAOJINGANGSHI—JINSHUFUHEBOMOQIEGEGONGJU

发布时间:2016-06-30 14:51:49

金刚石薄膜制品在机械加工、微电子、光学等领域已被广泛的应用并前景广阔,但高精度人造金刚石超薄切割工具的研制技术却成了我国工具及微电子行业迫切需要解决的问题。

ZHIBEIJINGANGSHI—JINSHUFUHEBOMOQIEGEGONGJUDEFANGFA

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DIANZHUFAZHIBEIDERENZAOJINGANGSHICHAOBOQIEGEGONGJUHOUDUJIAOYAZHIFAJINGDUGENGGAO、GENGBO,KEYONGYUWEIDIANZIQIJIANDEJINGMIHUAPIANHEKAICAO。

乐投英超DIANZHUFAZHIBEIJINGANGSHI—JINSHUFUHEBOMOQIEGEGONGJUSHILIYONGDIANHUAXUEYUANLI,CAIYONGDIANZHUFANGFAJINXINGZHIBEI。

DIANZHUFAZHUYAOZHIZUOHOUDUXIAOYU0.1mmDEBOMOQIEGEGONGJU,QIHOUDUCHICUNJINGDUYIBANWEI± 0.001~ ± 0.002mm,NEIKONGCHICUNJINGDUYIBANWEIH6、H7(YUYAZHIFAXIANGTONG),PINGXINGDUXIAOYU0.005mm(YUYAZHIFAXIANGTONG)。ZHUYAOTEDIANSHIJINGDU、QIANGDU、GANGXING、NAIMOXINGGAO,QIEFENGGENGZHAI、DAOREXINGHAO,SHIYONGSUDUKEDA100m/sZUOYOU,DANQIESHENXIAO(YIBANXIAOYU1mm),ZHUYAOYONGYUGEZHONGXINPIANDEHUAPIANHEKAICAO。 

KEJIAGONGDECAILIAOFANWEIXIANGDUIJIAOZHAI,ZHUYAOYONGYUGUI、SHENHUAJIA、LINHUAYINDENGBANDAOTICAILIAODEJIAGONG。YOUYUDIANZHUFAZHIBEIDERENZAOJINGANGSHI—JINSHUFUHEBOMOQIEGEGONGJUHOUDUGENGBO、JINGDUGENGGAO,SUOYIZHIZUONANDUJIAODA,JINGUANQIANSULIANYUSHANGSHIJI60NIANDAIYIYANZHICHUGAILEICHANPIN,DANXIANZAISHICHANGSHANGDEYONGLIANGBINGBUDUO。

乐投英超YAZHIFAZHIBEIJINGANGSHI—JINSHUFUHEBOMOQIEGEGONGJUSHICAIYONGFENMOYEJINYUANLI,TONGGUOYUANCAILIAOPEILIAO、HUNLIAO、YAZHICHENGXING、SHAOJIE、HOUXUJIAGONGDENGYIXILIEGONGYIJINXINGZHIBEI。

YAZHIFAZHUYAOZHIZUOHOUDUDAYU0.08mmYISHANGDEBOMOQIEGEGONGJU,HOUDUCHICUNJINGDUYIBANWEI± 0.002~ ± 0.005mm,NEIKONGCHICUNJINGDUYIBANWEIH6、H7,PINGXINGDUXIAOYU0.005mm,JUYOUJINGDUGAO、GANGXINGHAO、QIEGEFENGLIDUGAODETEXING,SHIYONGSUDUKEDA80m/sZUOYOU,KEJIAGONGCAILIAODEFANWEIGUANG。

乐投英超KEYONGYUGEZHONGCITOUCAILIAO、JIBAN、BOLI、TAOCI、JINGTI、YINGZHIHEJIN、TAOCI—JINSHUFUHECAILIAO、SHUZHI—TAOCIFUHECAILIAO、SHUZHI—TAOCI—JINSHUFUHECAILIAOJIJINSHUHUAHEWUDENGDEQIEDUANHEKAICAO。

乐投英超JINGANGSHI—JINSHUFUHEBOMOQIEGEGONGJUZHILIANGDEPINGJIABIAOZHUN 

乐投英超MUQIAN,DUIZHEILEICHANPINDEZHILIANGPINGJIAHAIWEIJIANYOUGUOJIBIAOZHUNHEGUONEIBIAOZHUNDEBAODAO,DANMEIYISHENGCHANDANWEIDOUYOUQIYEBIAOZHUNDUIZHEILEICHANPINJINXINGZHILIANGPINGJIA(QIYENEIKONG)。ZHEIXIEBIAOZHUNZHUYAOYISHICHANGDESHIYONGWEIZHUNZE,BAOKUOCHICUNHESHIYONGXINGNENGLIANGDABUFEN。CHICUNFANGMIANBAOKUO:JIBENCHICUNJIFANWEI(HOUDU、NEIKONG、WAIJINGDENG);JINGDUYAOQIU(HOUDUPIANCHA、NEIKONGJINGDU、WAIJINGJINGDU、PINGXINGDU、TONGZHOUDUDENG);BIAOMIANWAIXINGYAOQIU(WULIEWEN、DIAOBIAN、MAOBIAN、ROUYANKEJIANZAZHIDENGQUEXIAN);SHIYONGXINGNENGFANGMIANBAOKUO:ANQUANXINGNENGYAOQIU(DAOPIANQIANGDU);QIEGEXINGNENGYAOQIU(QIEGEGONGJIANDEBENGKOU、QIEFENGCHUIZHIDU、QIEGEMIANCUCAODUYIJIGONGJUDENAIYONGDU、SHOUMINGDENG)。

JINGANGSHI—JINSHUFUHEBOMOQIEGEGONGJUZHILIANGDEPINGJIABIAOZHUN 

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乐投英超DIANZHUGAOJINGDUJINGANGSHI—JINSHUFUHEBOMOQIEGEGONGJUDEZHIBEIFANGFA 

1 GONGJUTEDIAN

电铸高精度人造金刚石—金属复合薄膜切割工具与其它方法制作的切割工具相比具有以下特点:厚度超薄(一般为0.015~ 0.1mm)、精度高(厚度精度一般为小于0.003mm,圆度和同心度小于0.01mm,平行度小于0.005mm)、强度高、刚性好、内应力小、切割速度高(工作线速度可达100m/s)、切缝小、崩口小、材料利用率高、工件精度高、表面质量好等。随着大规模集成电路技术的发展和基片材料利用率的提高,该薄膜工具具有广阔的应用前景。

MUQIANDIANZHUFAYANZHIDEGAOJINGDUJINGANGSHI—JINSHUFUHEBOMOQIEGEPIANCONGJIEGOUSHANGDAZHIFENWEILIANGZHONG:YISHIBUDAIJITIDEQIEGEPIAN,CHENGWEIRUANDAO,QIJIEGOURUTU1SUOSHI;

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LINGYIZHONGSHIDAIJITIDEZHENGTIQIEGEPIAN,CHENGWEIYINGDAO,QIJIEGOURUTU2SUOSHI。

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乐投英超BUDAIJITIDEQIEGEPIANZAISHIYONGSHIXUCAIYONGRUTU3SUOSHIDEZHUANYONGJIAJUGUDINGDAOPIAN,BEIQIEGEGONGJIANBIAOMIANJIANTU4。

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乐投英超JIBENGONGYILIUCHENG 

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YINGXIANGGONGJUZHILIANGDEYINSU

虽然电铸是一种比较成熟的工艺,但由于电铸人造金刚石薄膜刀具的独特切割要求,使得在控制影响电镀质量因素方面相当困难,工艺要求非常严格。首先,必须保证提高刀片的厚度精度、平行度、减少工件侧面应力、减少崩口、提高切割速度、增加刀片使用寿命。 

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CUNZAIDEWENTIJIYANJIUFANGXIANG

乐投英超MUQIANDIANZHUGAOJINGDUJINGANGSHI—JINSHUFUHEBOMOQIEGEGONGJUZHUYAOCUNZAIJINGDUBUGOUGAO、NEIYING

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JINGGUODIAOYANFENXI,JIANYICONGYIXIAFANGMIANJINXINGKAIFAYANJIU:

(1)人造金刚石乐投英超—金属复合薄膜形成机理的研究;

(2)TESHUDIANZHUSHEBEIDESHEJI;

(3)DIYINGLIDIANDUYEDEPEIZHI;

(4)JINGANGSHI—JINSHUFUHEBOMODIANZHUYUANLIDEJICHUYANJIU;

乐投英超(5)JINGANGSHI—JINSHUFUHEBOMODIANZHUGONGYIJIGONGYICANSHUDEYANJIU;

乐投英超(6)MUBANYINJIDEZHIZUOJITUOMOGONGYIDEYANJIU;

(7)JINGANGSHI—JINSHUFUHEBOMOZHENGPINGGONGYIDEYANJIU;

(8)JINGANGSHI—JINSHUFUHEBOMOZENGQIANGGONGYIDEYANJIU;

(9)JINGANGSHI—JINSHUFUHEBOMOGONGJUZHIZUOGONGYIDEYANJIU;

(10)JIANGDIHUOXIAOCHUJINGANGSHI—JINSHUFUHEBOMONEIYINGLIJIQUEXIANGONGYIDEYANJIU;

(11)GAOJINGDUJINGANGSHI—JINSHUFUHEBOMOJIANCEJISHUDEYANJIU;

乐投英超(12)GAOJINGDUJINGANGSHI—JINSHUFUHEBOMOQIEGEXINGNENGDEYANJIU。

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